CVD &amp; ALD Precursors-Aladdin Scientific

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Trimethyl phosphate
- ≥99.99999% metals basis
Cas#: 512-56-1 Compound CID: 10541

Formula: C₃H₉O₄P Molecular Weight: 140.07

IUPAC Name: trimethyl phosphate

SMILES: COP(=O)(OC)OC

InChIKey: WVLBCYQITXONBZ-UHFFFAOYSA-N

InChI: InChI=1S/C3H9O4P/c1-5-8(4,6-2)7-3/h1-3H3

Synonyms: TRIMETHYL PHOSPHATE|512-56-1|Trimethylphosphate|Phosphoric acid, trimethyl ester|Trimethyl orthophosphate|Trimethoxyp...
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Pentakis (dimethylamino) tantalum(V)
- ≥99.9999% metals basis
Cas#: 19824-59-0 Compound CID: 140614

Formula: Ta(N(CH₃)₂)₅ Molecular Weight: 401.33

IUPAC Name: dimethylazanide;tantalum(5+)

SMILES: C[N-]C.C[N-]C.C[N-]C.C[N-]C.C[N-]C.[Ta+5]

InChIKey: VSLPMIMVDUOYFW-UHFFFAOYSA-N

InChI: InChI=1S/5C2H6N.Ta/c5*1-3-2;/h5*1-2H3;/q5*-1;+5
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