CVD & ALD Precursors

View as List Grid

Items 1-12 of 284

Set Descending Direction
  1. Iridium chloride
      Grade & Purity: 
    • crystalline ,Ir≥62.0%
    Cas#: 10025-83-9        Compound CID:  25563
    Formula:  IrCl3        Molecular Weight: 298.56
    IUPAC Name: trichloroiridium
    SMILES: Cl[Ir](Cl)Cl
    InChIKey: DANYXEHCMQHDNX-UHFFFAOYSA-K
    InChI: InChI=1S/3ClH.Ir/h3*1H;/q;;;+3/p-3
    Synonyms: DANYXEHCMQHDNX-UHFFFAOYSA-K | Iridium(III) chloride, anhydrous (99.95+%-Ir) | Trichloroiridium | UNII-20278OEG45 | DT...
  2. Zirconium(IV) t-butoxide
      Grade & Purity: 
    • ≥97%
    Cas#: 2081-12-1        Compound CID:  2733711
    Formula:  C16H36O4Zr        Molecular Weight: 383.68
    IUPAC Name: 2-methylpropan-2-ol;zirconium
    SMILES: CC(C)(C)O.CC(C)(C)O.CC(C)(C)O.CC(C)(C)O.[Zr]
    InChIKey: WRMYASGYMABHCC-UHFFFAOYSA-N
    InChI: InChI=1S/4C4H10O.Zr/c4*1-4(2,3)5;/h4*5H,1-3H3;
    Synonyms: zirconium(iv) t-butoxide | SCHEMBL108395 | Zirconium(IV) tert-butoxide, packaged for use in deposition systems | MFCD...
  3. Zirconium(IV) t-butoxide
      Grade & Purity: 
    • ≥99%
    Cas#: 2081-12-1        Compound CID:  2733711
    Formula:  C16H36O4Zr        Molecular Weight: 383.68
    IUPAC Name: 2-methylpropan-2-ol;zirconium
    SMILES: CC(C)(C)O.CC(C)(C)O.CC(C)(C)O.CC(C)(C)O.[Zr]
    InChIKey: WRMYASGYMABHCC-UHFFFAOYSA-N
    InChI: InChI=1S/4C4H10O.Zr/c4*1-4(2,3)5;/h4*5H,1-3H3;
    Synonyms: zirconium(iv) t-butoxide | SCHEMBL108395 | Zirconium(IV) tert-butoxide, packaged for use in deposition systems | MFCD...
  4. Beryllium acetylacetonate
      Grade & Purity: 
    • ≥97%
    Cas#: 10210-64-7        Compound CID:  5486772
    Formula:  C10H14BeO4        Molecular Weight: 207.23
    IUPAC Name: beryllium;(Z)-4-oxopent-2-en-2-olate
    SMILES: [Be+2].CC(=CC(=O)C)[O-].CC(=CC(=O)C)[O-]
    InChIKey: BBKXDHBLPBKCFR-FDGPNNRMSA-L
    InChI: InChI=1S/2C5H8O2.Be/c2*1-4(6)3-5(2)7;/h2*3,6H,1-2H3;/q;;+2/p-2/b2*4-3-;
    Synonyms: Beryllium acetylacetonate|10210-64-7|Z9095ZTD3U|Bis(2,4-pentanedionato)beryllium|beryllium 2,4-pentanedionate|Berylli...
  5. N,N''-Di-t-butyl-2,3-diamidobutanetin(II)
      Grade & Purity: 
    • ≥98%
    • 50-1150, contained in 50 ml Swagelok® cylinder(96-1070) for CVD/ALD
    Cas#: 1268357-44-3        Compound CID:  121235198
    Formula:  C12H26N2Sn        Molecular Weight: 317.06
    IUPAC Name: 1,3-ditert-butyl-1,3,2λ2-diazastannepane
    SMILES: CC(C)(C)N1CCCCN([Sn]1)C(C)(C)C
    InChIKey: OPXWRBRVIBWLSN-UHFFFAOYSA-N
    InChI: InChI=1S/C12H26N2.Sn/c1-11(2,3)13-9-7-8-10-14-12(4,5)6;/h7-10H2,1-6H3;/q-2;+2
  6. Tetrakis(ethylmethylamino)hafnium
      Grade & Purity: 
    • <0.15% Zr TEMAH,72-7720, contained in 50 ml Swagelok® cylinder96-1070 for CVD/ALD
    Cas#: 352535-01-4        Compound CID:  4103752
    Formula:  C12H32HfN4       
    IUPAC Name: ethyl(methyl)azanide;hafnium(4+)
    SMILES: CC[N-]C.CC[N-]C.CC[N-]C.CC[N-]C.[Hf+4]
    InChIKey: NPEOKFBCHNGLJD-UHFFFAOYSA-N
    InChI: InChI=1S/4C3H8N.Hf/c4*1-3-4-2;/h4*3H2,1-2H3;/q4*-1;+4
    Synonyms: Tetrakis(ethylmethylamido)hafnium(IV), packaged for use in deposition systems | SCHEMBL237323 | Tetrakis(ethylmethyla...
  7. Ytterbium(III) hexafluoroacetylacetonate dihydrate
      Grade & Purity: 
    • ≥99.9% metals basis(REO)
    Cas#: 81849-60-7        Compound CID:  74765547
    Formula:  C₁₅H₃F₁₈O₆Yb        Molecular Weight: 794.19 (830.22)
    IUPAC Name: 1,1,1,5,5,5-hexafluoro-4-hydroxypent-3-en-2-one;ytterbium;dihydrate
    SMILES: C(=C(C(F)(F)F)O)C(=O)C(F)(F)F.C(=C(C(F)(F)F)O)C(=O)C(F)(F)F.O.O.[Yb]
    InChIKey: MHHPBTBQHUHFDW-UHFFFAOYSA-N
    InChI: InChI=1S/2C5H2F6O2.2H2O.Yb/c2*6-4(7,8)2(12)1-3(13)5(9,10)11;;;/h2*1,12H;2*1H2;
Page
per page

We have obtained your location, but we do not collect data on your location. Do we accept redirection to the corresponding region based on your location?