CVD & ALD Precursors

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  1. Zirconium(IV) t-butoxide
      Grade & Purity: 
    • ≥97%
    Cas#: 2081-12-1        Compound CID:  2733711
    Formula:  C16H36O4Zr        Molecular Weight: 383.68
    IUPAC Name: 2-methylpropan-2-ol;zirconium
    SMILES: CC(C)(C)O.CC(C)(C)O.CC(C)(C)O.CC(C)(C)O.[Zr]
    InChIKey: WRMYASGYMABHCC-UHFFFAOYSA-N
    InChI: InChI=1S/4C4H10O.Zr/c4*1-4(2,3)5;/h4*5H,1-3H3;
    Synonyms: zirconium(iv) t-butoxide | SCHEMBL108395 | Zirconium(IV) tert-butoxide, packaged for use in deposition systems | MFCD...
  2. Beryllium acetylacetonate
      Grade & Purity: 
    • ≥97%
    Cas#: 10210-64-7        Compound CID:  5486772
    Formula:  C10H14BeO4        Molecular Weight: 207.23
    IUPAC Name: beryllium;(Z)-4-oxopent-2-en-2-olate
    SMILES: [Be+2].CC(=CC(=O)C)[O-].CC(=CC(=O)C)[O-]
    InChIKey: BBKXDHBLPBKCFR-FDGPNNRMSA-L
    InChI: InChI=1S/2C5H8O2.Be/c2*1-4(6)3-5(2)7;/h2*3,6H,1-2H3;/q;;+2/p-2/b2*4-3-;
    Synonyms: Beryllium acetylacetonate|10210-64-7|Z9095ZTD3U|Bis(2,4-pentanedionato)beryllium|beryllium 2,4-pentanedionate|Berylli...
  3. Bis(2-methylallyl)(1,5-cyclooctadiene)ruthenium(II)
      Grade & Purity: 
    • ≥97%
    Cas#: 12289-94-0        Compound CID:  11809349
    Formula:  C16H26Ru        Molecular Weight: 319.45
    IUPAC Name: (1Z,5Z)-cycloocta-1,5-diene;2-methanidylprop-1-ene;ruthenium(2+)
    SMILES: CC(=C)[CH2-].CC(=C)[CH2-].C1CC=CCCC=C1.[Ru+2]
    InChIKey: POYBJJLKGYXKJH-PHFPKPIQSA-N
    InChI: InChI=1S/C8H12.2C4H7.Ru/c1-2-4-6-8-7-5-3-1;2*1-4(2)3;/h1-2,7-8H,3-6H2;2*1-2H2,3H3;/q;2*-1;+2/b2-1-,8-7-;;;
    Synonyms: RUTHENIUMIICYCLOOCTADIENEBIS-(2,2,6,6-TETRAMETHYLHEPTANEDIONATE) | Bis(2-methylallyl)-1,5-cyclooctadieneruthenium (II...
  4. Bis(benzene)chromium(0)
      Grade & Purity: 
    • ≥97%
    Cas#: 1271-54-1        Compound CID:  10932683
    Formula:  C12H12Cr        Molecular Weight: 208.22
    IUPAC Name: benzene;chromium
    SMILES: C1=CC=CC=C1.C1=CC=CC=C1.[Cr]
    InChIKey: HVURSIGIEONDKB-UHFFFAOYSA-N
    InChI: InChI=1S/2C6H6.Cr/c2*1-2-4-6-5-3-1;/h2*1-6H;
    Synonyms: Bis(benzene)chromium(0), 97% | benzene;chromium | Chromium, bis(benzene)-(8CI) | Q421390 | bis(benzene) chromium | Di...
  5. Copper(II) trifluoroacetylacetonate
      Grade & Purity: 
    • ≥97%
    Cas#: 14324-82-4        Compound CID:  5483683
    Formula:  Cu(C5H4F3O2)2        Molecular Weight: 369.7
    Synonyms: EINECS 238-271-4 | AI3-61599 | Copper, bis[2-(trifluoromethyl)acetoacetaldehydato]- (8CI) | NSC 49748 | 4,4-(3,6-Diox...
  6. Hafnium acetylacetonate
      Grade & Purity: 
    • ≥97%
    Cas#: 17475-67-1        Compound CID:  11330624
    Formula:  C20H28HfO8        Molecular Weight: 574.93
    IUPAC Name: hafnium;(Z)-4-hydroxypent-3-en-2-one
    SMILES: CC(=CC(=O)C)O.CC(=CC(=O)C)O.CC(=CC(=O)C)O.CC(=CC(=O)C)O.[Hf]
    InChIKey: XFRUSXFSJAEXPU-MTOQALJVSA-N
    InChI: InChI=1S/4C5H8O2.Hf/c4*1-4(6)3-5(2)7;/h4*3,6H,1-2H3;/b4*4-3-;
    Synonyms: Hafnium(IV) 2,4-pentanedionate
  7. Calcium hexafluoroacetylacetonate dihydrate
      Grade & Purity: 
    • ≥97%
    Cas#: 141572-90-9        Compound CID:  5702827
    Formula:  C₁0H₂CaF₁₂O₄        Molecular Weight: 454.18 (486.18)
    IUPAC Name: calcium;(Z)-1,1,1,5,5,5-hexafluoro-4-oxopent-2-en-2-olate;dihydrate
    SMILES: C(=C(C(F)(F)F)[O-])C(=O)C(F)(F)F.C(=C(C(F)(F)F)[O-])C(=O)C(F)(F)F.O.O.[Ca+2]
    InChIKey: CSKMJQHMZGBTNJ-LJDKTGGESA-L
    InChI: InChI=1S/2C5H2F6O2.Ca.2H2O/c2*6-4(7,8)2(12)1-3(13)5(9,10)11;;;/h2*1,12H;;2*1H2/q;;+2;;/p-2/b2*2-1-;;;
  8. Bis(dimethylamino-2-propoxy)copper(II)
      Grade & Purity: 
    • ≥97%
    Cas#: 185827-91-2        Compound CID:  118692250
    Formula:  C10H24CuN2O2        Molecular Weight: 267.86
    IUPAC Name: copper;1-(dimethylamino)propan-2-ol
    SMILES: CC(CN(C)C)O.CC(CN(C)C)O.[Cu]
    InChIKey: XTHFURGQRDMERX-UHFFFAOYSA-N
    InChI: InChI=1S/2C5H13NO.Cu/c2*1-5(7)4-6(2)3;/h2*5,7H,4H2,1-3H3;
    Synonyms: Bis(dimethylamino-2-propoxy)copper(II) | copper;1-(dimethylamino)propan-2-ol | SCHEMBL17475532 | Bis(dimethylamino-2-...
  9. Bis(2,2,6,6-tetramethyl-3,5-heptanedionato)calcium
      Grade & Purity: 
    • ≥97%
    Cas#: 118448-18-3        Compound CID:  6917035
    Formula:  C22H38CaO4        Molecular Weight: 406.62
    IUPAC Name: calcium;(Z)-2,2,6,6-tetramethyl-5-oxohept-3-en-3-olate
    SMILES: CC(C)(C)C(=CC(=O)C(C)(C)C)[O-].CC(C)(C)C(=CC(=O)C(C)(C)C)[O-].[Ca+2]
    InChIKey: DOOFPPIHJGRIGW-ATMONBRVSA-L
    InChI: InChI=1S/2C11H20O2.Ca/c2*1-10(2,3)8(12)7-9(13)11(4,5)6;/h2*7,12H,1-6H3;/q;;+2/p-2/b2*8-7-;
    Synonyms: Calcium-DPM | Ca(TMHD){2}
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