CVD & ALD Precursors
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Silicon(IV) bromideCas#: 7789-66-4 Compound CID: 82247Formula: SiBr4 Molecular Weight: 347.70IUPAC Name: tetrabromosilaneSMILES: [Si](Br)(Br)(Br)BrInChIKey: AIFMYMZGQVTROK-UHFFFAOYSA-NInChI: InChI=1S/Br4Si/c1-5(2,3)4Synonyms: Silicon tetrabromide | Tetrabromosilane
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Hafnium chlorideCas#: 13499-05-3 Compound CID: 37715Formula: Cl4Hf Molecular Weight: 320.3IUPAC Name: tetrachlorohafniumSMILES: Cl[Hf](Cl)(Cl)ClInChIKey: PDPJQWYGJJBYLF-UHFFFAOYSA-JInChI: InChI=1S/4ClH.Hf/h4*1H;/q;;;;+4/p-4Synonyms: Hafnium tetrachloride | Tetrachlorohafnium
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Hexakis(ethylamino)disilanesCas#: 532980-53-3 Compound CID: 11336203Formula: C12H36N6Si2 Molecular Weight: 320.63IUPAC Name: N-[bis(ethylamino)-[tris(ethylamino)silyl]silyl]ethanamineSMILES: CCN[Si](NCC)(NCC)[Si](NCC)(NCC)NCCInChIKey: WMAAIGILTZEOHE-UHFFFAOYSA-NInChI: InChI=1S/C12H36N6Si2/c1-7-13-19(14-8-2,15-9-3)20(16-10-4,17-11-5)18-12-6/h13-18H,7-12H2,1-6H3Synonyms: DTXSID40462800 | N-[bis(ethylamino)-[tris(ethylamino)silyl]silyl]ethanamine | Hexakis(ethylamino)disilane (99.995%-Si...
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Triethyl phosphateCas#: 78-40-0 Compound CID: 6535Formula: C6H15O4P Molecular Weight: 182.15IUPAC Name: triethyl phosphateSMILES: CCOP(=O)(OCC)OCCInChIKey: DQWPFSLDHJDLRL-UHFFFAOYSA-NInChI: InChI=1S/C6H15O4P/c1-4-8-11(7,9-5-2)10-6-3/h4-6H2,1-3H3Synonyms: BP-31112 | EN300-19166 | QIH4K96K7J | A865040 | AKOS000120082 | NSC2677 | NSC-2677 | SCHEMBL21887 | Z104473010 | TRIE...
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Aluminum chlorideCas#: 7446-70-0 Compound CID: 254784083Formula: AlCl3 Molecular Weight: 133.34Synonyms: Aluminum trichloride anhydrous Aluminium chloride Aluminum trichloride
