CVD & ALD Precursors

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  1. Tantalum(V) n-butoxide
      Grade & Purity: 
    • ≥99.99%
    Cas#: 51094-78-1        Compound CID:  170974
    Formula:  C20H45O5Ta        Molecular Weight: 546.52
    IUPAC Name: butan-1-olate;tantalum(5+)
    SMILES: CCCC[O-].CCCC[O-].CCCC[O-].CCCC[O-].CCCC[O-].[Ta+5]
    InChIKey: QORWLRPWMJEJKP-UHFFFAOYSA-N
    InChI: InChI=1S/5C4H9O.Ta/c5*1-2-3-4-5;/h5*2-4H2,1H3;/q5*-1;+5
    Synonyms: Tantalum pentabutanolate | 1-Butanol, tantalum(5+) salt | DTXSID00890867 | Tantalum(V) butoxide | Butanol, tantalum s...
  2. Silicon(IV) bromide
      Grade & Purity: 
    • ≥99.995% metals basis
    Cas#: 7789-66-4        Compound CID:  82247
    Formula:  SiBr4        Molecular Weight: 347.70
    IUPAC Name: tetrabromosilane
    SMILES: [Si](Br)(Br)(Br)Br
    InChIKey: AIFMYMZGQVTROK-UHFFFAOYSA-N
    InChI: InChI=1S/Br4Si/c1-5(2,3)4
    Synonyms: Silicon tetrabromide | Tetrabromosilane
  3. Hexakis(ethylamino)disilanes
      Grade & Purity: 
    • ≥99.995% metals basis
    Cas#: 532980-53-3        Compound CID:  11336203
    Formula:  C12H36N6Si2        Molecular Weight: 320.63
    IUPAC Name: N-[bis(ethylamino)-[tris(ethylamino)silyl]silyl]ethanamine
    SMILES: CCN[Si](NCC)(NCC)[Si](NCC)(NCC)NCC
    InChIKey: WMAAIGILTZEOHE-UHFFFAOYSA-N
    InChI: InChI=1S/C12H36N6Si2/c1-7-13-19(14-8-2,15-9-3)20(16-10-4,17-11-5)18-12-6/h13-18H,7-12H2,1-6H3
    Synonyms: DTXSID40462800 | N-[bis(ethylamino)-[tris(ethylamino)silyl]silyl]ethanamine | Hexakis(ethylamino)disilane (99.995%-Si...
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