CVD &amp; ALD Precursors-Aladdin Scientific

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Tetraethyl orthosilicate
- ≥99%(GC)
Cas#: 78-10-4 Compound CID: 6517

Formula: C₈H₂₀O₄Si Molecular Weight: 208.33

IUPAC Name: tetraethyl silicate

SMILES: CCO[Si](OCC)(OCC)OCC

InChIKey: BOTDANWDWHJENH-UHFFFAOYSA-N

InChI: InChI=1S/C8H20O4Si/c1-5-9-13(10-6-2,11-7-3)12-8-4/h5-8H2,1-4H3

Synonyms: TEOS | MFCD00009062 | Silicic acid, tetraethyl ester | Etylu krzemian [Polish] | tetraethylortho silicate | EC 201-08...
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Trimethyl phosphate
- ≥99.99999% metals basis
Cas#: 512-56-1 Compound CID: 10541

Formula: C₃H₉O₄P Molecular Weight: 140.07

IUPAC Name: trimethyl phosphate

SMILES: COP(=O)(OC)OC

InChIKey: WVLBCYQITXONBZ-UHFFFAOYSA-N

InChI: InChI=1S/C3H9O4P/c1-5-8(4,6-2)7-3/h1-3H3

Synonyms: TRIMETHYL PHOSPHATE|512-56-1|Trimethylphosphate|Phosphoric acid, trimethyl ester|Trimethyl orthophosphate|Trimethoxyp...
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