CVD & ALD Precursors

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  1. Tetraethyl orthosilicate
      Grade & Purity: 
    • ≥99%(GC)
    Cas#: 78-10-4        Compound CID:  6517
    Formula:  C8H20O4Si        Molecular Weight: 208.33
    IUPAC Name: tetraethyl silicate
    SMILES: CCO[Si](OCC)(OCC)OCC
    InChIKey: BOTDANWDWHJENH-UHFFFAOYSA-N
    InChI: InChI=1S/C8H20O4Si/c1-5-9-13(10-6-2,11-7-3)12-8-4/h5-8H2,1-4H3
    Synonyms: TEOS | MFCD00009062 | Silicic acid, tetraethyl ester | Etylu krzemian [Polish] | tetraethylortho silicate | EC 201-08...
  2. Trimethyl phosphate
    Cas#: 512-56-1        Compound CID:  10541
    Formula:  C3H9O4P        Molecular Weight: 140.07
    IUPAC Name: trimethyl phosphate
    SMILES: COP(=O)(OC)OC
    InChIKey: WVLBCYQITXONBZ-UHFFFAOYSA-N
    InChI: InChI=1S/C3H9O4P/c1-5-8(4,6-2)7-3/h1-3H3
    Synonyms: TRIMETHYL PHOSPHATE|512-56-1|Trimethylphosphate|Phosphoric acid, trimethyl ester|Trimethyl orthophosphate|Trimethoxyp...
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