CVD & ALD Precursors

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  1. Trimethyl phosphate
    Cas#: 512-56-1        Compound CID:  10541
    Formula:  C3H9O4P        Molecular Weight: 140.07
    IUPAC Name: trimethyl phosphate
    SMILES: COP(=O)(OC)OC
    InChIKey: WVLBCYQITXONBZ-UHFFFAOYSA-N
    InChI: InChI=1S/C3H9O4P/c1-5-8(4,6-2)7-3/h1-3H3
    Synonyms: TRIMETHYL PHOSPHATE|512-56-1|Trimethylphosphate|Phosphoric acid, trimethyl ester|Trimethyl orthophosphate|Trimethoxyp...
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