CVD & ALD Precursors
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Trimethyl phosphateCas#: 512-56-1 Compound CID: 10541Formula: C3H9O4P Molecular Weight: 140.07IUPAC Name: trimethyl phosphateSMILES: COP(=O)(OC)OCInChIKey: WVLBCYQITXONBZ-UHFFFAOYSA-NInChI: InChI=1S/C3H9O4P/c1-5-8(4,6-2)7-3/h1-3H3Synonyms: TRIMETHYL PHOSPHATE|512-56-1|Trimethylphosphate|Phosphoric acid, trimethyl ester|Trimethyl orthophosphate|Trimethoxyp...