CVD &amp; ALD Precursors-Aladdin Scientific

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Trimethyl phosphate
- ≥99.99999% metals basis
Cas#: 512-56-1 Compound CID: 10541

Formula: C₃H₉O₄P Molecular Weight: 140.07

IUPAC Name: trimethyl phosphate

SMILES: COP(=O)(OC)OC

InChIKey: WVLBCYQITXONBZ-UHFFFAOYSA-N

InChI: InChI=1S/C3H9O4P/c1-5-8(4,6-2)7-3/h1-3H3

Synonyms: TRIMETHYL PHOSPHATE|512-56-1|Trimethylphosphate|Phosphoric acid, trimethyl ester|Trimethyl orthophosphate|Trimethoxyp...
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Tantalum(V) n-butoxide
- ≥99.99%
Cas#: 51094-78-1 Compound CID: 170974

Formula: C₂₀H₄₅O₅Ta Molecular Weight: 546.52

IUPAC Name: butan-1-olate;tantalum(5+)

SMILES: CCCC[O-].CCCC[O-].CCCC[O-].CCCC[O-].CCCC[O-].[Ta+5]

InChIKey: QORWLRPWMJEJKP-UHFFFAOYSA-N

InChI: InChI=1S/5C4H9O.Ta/c5*1-2-3-4-5;/h5*2-4H2,1H3;/q5*-1;+5

Synonyms: Tantalum pentabutanolate | 1-Butanol, tantalum(5+) salt | DTXSID00890867 | Tantalum(V) butoxide | Butanol, tantalum s...
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